Closed loop operation of time-based accelerometers
| العنوان: | Closed loop operation of time-based accelerometers |
|---|---|
| المؤلفون: | Dias, Rosana A., Wolffenbuttel, R. F., Cretu, E., Rocha, Luís A. |
| المساهمون: | Universidade do Minho |
| بيانات النشر: | Ilmenau University of Technology, 2012. |
| سنة النشر: | 2012 |
| مصطلحات موضوعية: | Pull-In, Accelerometer, Closed-loop, Electrostatic actuation |
| الوصف: | In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. |
| Description (Translated): | Fundação para a Ciência e a Tecnologia (FCT) |
| وصف الملف: | application/pdf |
| اللغة: | English |
| الاتاحة: | http://hdl.handle.net/1822/21888 |
| Rights: | restricted access |
| رقم الانضمام: | rcaap.com.repositorium.repositorium.sdum.uminho.pt.1822.21888 |
| قاعدة البيانات: | RCAAP |
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