التفاصيل البيبلوغرافية
| العنوان: |
Closed loop operation of time-based accelerometers |
| المؤلفون: |
Dias, Rosana A., Wolffenbuttel, R. F., Cretu, E., Rocha, Luís A. |
| المساهمون: |
Universidade do Minho |
| بيانات النشر: |
Ilmenau University of Technology, 2012. |
| سنة النشر: |
2012 |
| مصطلحات موضوعية: |
Pull-In, Accelerometer, Closed-loop, Electrostatic actuation |
| الوصف: |
In this paper we present a method for closed-loop operation of pull-in time accelerometers. Accelerometers based on the measurement of the pull-in time of movable parallel-plates MEMS structures have already demonstrated very good resolution capabilities, with low requirements on the capacitive readout. However, open-loop operation delivers very low dynamic range and highly non-linear response. The closed-loop approach relies on electrostatic feedback using counter-actuation electrodes opposite to the pull-in direction and although the control algorithm used was very simple, the dynamic range has been effectively extended and the linearity improved. |
| Description (Translated): |
Fundação para a Ciência e a Tecnologia (FCT) |
| وصف الملف: |
application/pdf |
| اللغة: |
English |
| الاتاحة: |
http://hdl.handle.net/1822/21888 |
| Rights: |
restricted access |
| رقم الانضمام: |
rcaap.com.repositorium.repositorium.sdum.uminho.pt.1822.21888 |
| قاعدة البيانات: |
RCAAP |