Squeeze-film damper design with air channels : experimental verification
| العنوان: | Squeeze-film damper design with air channels : experimental verification |
|---|---|
| المؤلفون: | Dias, R. A., Cretu, E., Wolffenbuttel, R. F., Rocha, Luís A. |
| المساهمون: | Universidade do Minho |
| بيانات النشر: | Elsevier 1, 2011. |
| سنة النشر: | 2011 |
| مصطلحات موضوعية: | Squeeze-film damping, Air channels, MEMS capacitive sensing, Science & Technology |
| الوصف: | The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value. |
| Description (Translated): | Fundação para a Ciência e a Tecnologia (FCT) |
| وصف الملف: | application/pdf |
| اللغة: | English |
| Relation: | 1877-7058; http://www.elsevier.com |
| DOI: | 10.1016/j.proeng.2011.12.012 |
| الاتاحة: | https://hdl.handle.net/1822/14701 |
| Rights: | restricted access |
| رقم الانضمام: | rcaap.com.repositorium.repositorium.sdum.uminho.pt.1822.14701 |
| قاعدة البيانات: | RCAAP |
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