التفاصيل البيبلوغرافية
| العنوان: |
Squeeze-film damper design with air channels : experimental verification |
| المؤلفون: |
Dias, R. A., Cretu, E., Wolffenbuttel, R. F., Rocha, Luís A. |
| المساهمون: |
Universidade do Minho |
| بيانات النشر: |
Elsevier 1, 2011. |
| سنة النشر: |
2011 |
| مصطلحات موضوعية: |
Squeeze-film damping, Air channels, MEMS capacitive sensing, Science & Technology |
| الوصف: |
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value. |
| Description (Translated): |
Fundação para a Ciência e a Tecnologia (FCT) |
| وصف الملف: |
application/pdf |
| اللغة: |
English |
| Relation: |
1877-7058; http://www.elsevier.com |
| DOI: |
10.1016/j.proeng.2011.12.012 |
| الاتاحة: |
https://hdl.handle.net/1822/14701 |
| Rights: |
restricted access |
| رقم الانضمام: |
rcaap.com.repositorium.repositorium.sdum.uminho.pt.1822.14701 |
| قاعدة البيانات: |
RCAAP |