Patent
Device and method for evacuating a chamber and purifying the gas extracted from said chamber
| العنوان: | Device and method for evacuating a chamber and purifying the gas extracted from said chamber |
|---|---|
| Patent Number: | 11802,562 |
| تاريخ النشر: | October 31, 2023 |
| Appl. No: | 17/015590 |
| Application Filed: | September 09, 2020 |
| مستخلص: | A device evacuates a chamber and purifies the gas extracted from said chamber of any foreign substances. The device comprises a dry-condensing vacuum pump having an input connected to the chamber to be evacuated and is suitable for maintaining the input pressure at a constant level at the output despite variable conditions. An intermediate line which connects to the output of the dry-condensing vacuum pump and a liquid ring vacuum pump, the input of which is connected to the intermediate line, are additionally provided. A corresponding method makes it possible to purify the gas of any foreign substances reliably and effectively. |
| Inventors: | Kösters, Heiner (Itzehoe, DE); Gottschlich, Uwe (Hohenaspe, DE) |
| Assignees: | Sterling Industry Consult GmbH (Itzehoe, DE) |
| Claim: | 1. A method for evacuating a vacuum coating processing chamber, said vacuum coating processing chamber having an atmosphere of a gas and solid substances dissolved in said gas, said method comprising: drawing the gas out of the vacuum coating processing chamber; increasing the pressure of the gas, with a first pump to a value below atmospheric pressure, the first pump having an inlet pressure and an outlet pressure, wherein the first pump is configured for keeping the inlet pressure constant even if the outlet pressure is variable, wherein an inlet and an outlet of the first pump are separated from one another by a plurality of sealing gaps in series, the inlet being connected to the vacuum coating processing chamber, and wherein an intermediate line connects to the outlet of the first pump; conducting the gas onward to a liquid ring vacuum pump which outputs the gas at atmospheric pressure, the liquid ring vacuum pump having an operating liquid and an inlet connected to the intermediate line, said liquid ring vacuum pump absorbing solid substances condensing from the gas into the operating liquid; and replacing the operating liquid with fresh operating liquid when the operating liquid has been enriched with absorbed solid substances during operation of the liquid ring vacuum pump. |
| Claim: | 2. The method of claim 1 , wherein the first pump comprises a dry-compression vacuum pump. |
| Claim: | 3. The method of claim 1 , wherein the first pump generates a pressure of between 1 mbar and 40 mbar at the inlet side. |
| Claim: | 4. The method of claim 1 , wherein the first pump generates a pressure of between 80 mbar and 300 mbar in the intermediate line. |
| Claim: | 5. The method of claim 1 , wherein an opening for a supply of scavenging gas is provided at the outlet of the first pump and/or in the intermediate line. |
| Claim: | 6. The method of claim 5 , wherein the first pump has a housing characterized in that the opening is a gap that exists between a shaft and the housing of the first pump. |
| Claim: | 7. The method of claim 1 , wherein the liquid ring vacuum pump has an operating liquid and is provided with an inlet and an outlet for the operating liquid, which inlet and outlet permit an inflow and outflow of the operating liquid during operation of the liquid ring vacuum pump. |
| Claim: | 8. The method of claim 1 , wherein the operating liquid has a conductivity, characterized in that a sensor determines the conductivity of the operating liquid. |
| Claim: | 9. The method of claim 7 , wherein the operating liquid has an inflow and an outflow and a concentration of foreign substances, characterized in that a control device adjusts the inflow and the outflow of the operating liquid as a function of the concentration of foreign substances in the operating liquid. |
| Claim: | 10. The method of claim 1 , wherein the operating liquid has a concentration of foreign substances characterized in that the operating liquid of the liquid ring vacuum pump contains a solvent which is coordinated with the foreign substances contained in the gas. |
| Claim: | 11. The method of claim 1 , wherein the operating liquid has a pH value, characterized in that a pH sensor determines the pH value of the operating liquid. |
| Claim: | 12. The method of claim 11 , wherein the sensor determines measurement values, characterized in that a control device adjusts the pH value of the operating liquid as a function of the measurement values from the pH sensor. |
| Claim: | 13. The method of claim 1 , wherein a combustion device is arranged in the intermediate line. |
| Claim: | 14. The method of claim 1 , wherein the first pump generates a pressure of between 2 mbar and 30 mbar at the inlet side. |
| Claim: | 15. The method of claim 1 , wherein the first pump generates a pressure of between 5 mbar and 20 mbar at the inlet side. |
| Claim: | 16. The method of claim 1 , wherein the first pump generates a pressure of between 100 mbar and 150 mbar in the intermediate line. |
| Claim: | 17. The method of claim 3 , wherein the first pump generates a pressure of between 100 mbar and 150 mbar in the intermediate line. |
| Claim: | 18. The method of claim 3 , wherein an opening for a supply of scavenging gas is provided at the outlet of the first pump and/or in the intermediate line. |
| Claim: | 19. The method of claim 4 , wherein an opening for a supply of scavenging gas is provided at the outlet of the first pump and/or in the intermediate line. |
| Claim: | 20. The method of claim 3 , wherein the liquid ring vacuum pump has an operating liquid and is provided with an inlet and an outlet for the operating liquid, which inlet and outlet permit an inflow and outflow of the operating liquid during operation of the liquid ring vacuum pump. |
| Patent References Cited: | 3956072 May 1976 Huse 4225288 September 1980 Mugele et al. 5326383 July 1994 Harris 5458862 October 1995 Glawion 5975857 November 1999 Kuhn et al. 6375431 April 2002 Ando 6558131 May 2003 Nash, Jr. 7465375 December 2008 Demers et al. 20020131870 September 2002 Puech 20040173312 September 2004 Shibayama et al. 20110142740 June 2011 Lundahl 1129872 January 1957 2527137 August 1996 10-238462 September 1998 WO1989012169 December 1989 |
| Other References: | Search Report. cited by applicant English Translation of FR1129872. cited by applicant Korean Office Action. cited by applicant English Translation of Korean Office Action. cited by applicant |
| Assistant Examiner: | Shao, Phillip Y |
| Primary Examiner: | Jones, Christopher P |
| Attorney, Agent or Firm: | Alix, Yale & Ristas, LLP |
| رقم الانضمام: | edspgr.11802562 |
| قاعدة البيانات: | USPTO Patent Grants |
| الوصف غير متاح. |