التفاصيل البيبلوغرافية
| العنوان: |
PREDICTIVE LINK PROCESSING |
| Document Number: |
20120241427 |
| تاريخ النشر: |
September 27, 2012 |
| Appl. No: |
13/404930 |
| Application Filed: |
February 24, 2012 |
| مستخلص: |
A method of processing material of device elements by laser interaction is disclosed. According to one aspect, the method includes generating a pulsed laser processing output along a laser beam axis, the output including a plurality of laser pulses triggered sequentially at times determined by a pulse repetition rate. A trajectory relative to locations of device elements to be processed is generated. A position of one or more designated device elements relative to an intercept point position on the trajectory at one or more laser pulse times is determined, and a laser beam is deflected based on the predicted position within a predetermined deflection range. According to some aspects, the predetermined deflection range may correspond to a compass rose or cruciform field shape. As a result, a deflection accuracy for laser processing may be improved. |
| Inventors: |
Maltsev, Dimitry (Carlisle, MA, US); Romashko, Dmitry N. (Lexington, MA, US); Plotkin, Michael (Newton, MA, US); Ehrmann, Jonathan S. (Sudbury, MA, US); Cordingley, James J. (Littleton, MA, US) |
| Assignees: |
GSI Group Corporation (Bedford, MA, US) |
| Claim: |
1-58. (canceled) |
| Claim: |
59. A method of processing selected material within a deflection field by laser interaction, the material distributed at locations about a workpiece, the method comprising: storing data representative of a selected processing field shape that comprises a portion of the deflection field; storing data representative of one or more workpiece locations selected for processing; moving the workpiece relative to the deflection field; comparing the position of the one or more workpiece locations in the deflection field with the selected field shape; and preventing laser interaction at any one of the one or more workpiece locations that is not within the selected field shape. |
| Claim: |
60. The method of claim 59, further comprising selecting a first one of the one or more workpiece locations selected for processing to be processed before a second one of the one or more workpiece locations selected for processing, the selection based on the predicted positions of the first and second workpiece locations within the selected field shape. |
| Claim: |
61. The method of claim 59, wherein the stored timing date is representative of a processing rate at or above 70 kHz. |
| Claim: |
62. The method of claim 59, further comprising generating a laser trigger signal to initiate laser interaction at a designated workpiece location. |
| Claim: |
63. The method of claim 62, further comprising generating a pulse picking command to select laser pulses for processing selected material. |
| Claim: |
64. The method of claim 59, further comprising generating spot displacement commands to deflect laser pulses to selected material location within the selected field shape. |
| Claim: |
65. The method of claim 64, further comprising, in advance of a laser pulse, generating a corresponding acoustic wave having an RF frequency to deflect the laser pulse to a predetermined field position. |
| Claim: |
66. The method of claim 65, wherein the acoustic wave is generated before a previously generated acoustic wave deflects a laser pulse. |
| Claim: |
67. The method of claim 59, further comprising generating stage positioning commands to move the workpiece relative to the selected field shape. |
| Claim: |
68. The method of claim 59, further comprising controlling laser trigger timing signals, pulse picking commands, spot displacement commands and stage positioning commands to process selected material. |
| Claim: |
69. The method of claim 68, wherein controlling compromises executing steps of a control program. |
| Claim: |
70. The method of claim 59, wherein the selected shape comprises a truncated four point compass rose shape. |
| Claim: |
71. The method of claim 59, wherein material at a selected workpiece location falls outside the selected shape, and the workpiece location remains stored for processing with a subsequent blast. |
| Claim: |
72. The method of claim 59, wherein the selected shape comprises a shape that is rotated relative to a deflection axis of the deflection field. |
| Claim: |
73. The method of claim 59, wherein the selected shape comprises a shape that is laterally offset relative to a center position of the deflection field. |
| Claim: |
74. The method of claim 59, wherein the selected shape is determined based on one or more field dependent deflection parameters including at least one of pulse energy delivered as a function of field position and positioning error as a function of field position. |
| Claim: |
75. The method of claim 74, wherein the shape is determined based on both positioning error as a function of field position and pulse energy as a function of field position. |
| Claim: |
76. A system for processing selected material within a deflection field by laser interaction, the material distributed at locations about a workpiece, the system comprising: a laser source configured to generate a pulsed laser processing output along a laser beam axis; one or more beam deflectors defining a deflection field; means for moving the workpiece relative to the deflection field; and a system controller configured to: store data representative of a selected processing field shape that comprises a portion of the deflection field; store data representative of one or more workpiece locations selected for processing; move the workpiece relative to the deflection field; compare the position of the one or more workpiece locations in the deflection field with the selected field shape; and prevent laser interaction at any one of the one or more workpiece locations that is not within the selected field shape. |
| Claim: |
77. The system of claim 76, wherein the one or more beam deflectors comprise one or more acousto-optic deflectors. |
| Claim: |
78. The system of claim 76, wherein the means for moving the workpiece comprises a motion stage. |
| Claim: |
79. The system of claim 76, wherein the selected shape comprises a truncated four point compass rose shape. |
| Claim: |
80. The system of claim 76, wherein the controller is configured such that material at a selected workpiece location falls outside the selected shape, and the workpiece location remains stored for processing with a subsequent blast. |
| Claim: |
81. The system of claim 76, wherein the selected shape comprises a shape that is rotated relative to a deflection axis of the deflection field. |
| Claim: |
82. The system of claim 76, wherein the selected shape comprises a shape that is laterally offset relative to a center position of the deflection field. |
| Current U.S. Class: |
21912/185 |
| Current International Class: |
23 |
| رقم الانضمام: |
edspap.20120241427 |
| قاعدة البيانات: |
USPTO Patent Applications |