التفاصيل البيبلوغرافية
| العنوان: |
DYNAMIC MODE AFM APPARATUS |
| Document Number: |
20110055983 |
| تاريخ النشر: |
March 3, 2011 |
| Appl. No: |
12/990070 |
| Application Filed: |
April 08, 2009 |
| مستخلص: |
There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface. The dynamic mode AFM apparatus comprises: a scanner 3 for performing three-dimensional relative scanning of a cantilever 2 and a sample 1; a means 8 for generating an AC signal of a resonance frequency in a mode with flexural vibration of the cantilever 2; a means 9 for exciting the flexural vibration of the cantilever 2 with the resonance frequency; a means 10 for generating an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a means 11 for modulating a probe 2A-sample 1 distance of the cantilever 2 with the second frequency; a means 5 for detecting fluctuation of the resonance frequency; a means 4 for detecting vibration of the cantilever; and a means 6 for detecting a fluctuation component which is contained in a detected signal by the means 5 for detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe 2A-sample 1 distance, wherein an inclination of the resonance frequency against the probe 2A-sample 1 distance is obtained from the strength and polarity of the fluctuation component. |
| Inventors: |
Kawakatsu, Hideki (Tokyo, JP); Kobayashi, Dai (Tokyo, JP) |
| Assignees: |
JAPAN SCIENCE AND TECHNOLOGY AGENCY (Kawaguchi-shi, Saitama, JP) |
| Claim: |
1. A dynamic mode AFM apparatus comprising: (a) a scanner for performing three-dimensional relative scanning of a cantilever and a sample; (b) a means for generating an AC signal of a resonance frequency in a mode with flexural vibration of the cantilever; (c) a means for exciting the flexural vibration of the cantilever with the resonance frequency; (d) a means for generating an AC signal of a second frequency which is lower than the frequency of the flexural vibration; (e) a means for modulating a probe-sample distance of the cantilever with the second frequency; (f) a means for detecting fluctuation of the resonance frequency; (g) a means for detecting vibration of the cantilever; and (h) a means for detecting a fluctuation component which is contained in a detected signal by the means for detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe-sample distance, (i) wherein an inclination of the resonance frequency against the probe-sample distance is obtained from strength and polarity of the fluctuation component. |
| Claim: |
2. The dynamic mode AFM apparatus according to claim 1, wherein the probe-sample distance is automatically controlled so that the inclination of the resonance frequency against the probe-sample distance becomes zero. |
| Claim: |
3. The dynamic mode AFM apparatus according to claim 1, wherein a frequency in a mode with flexural vibration of a lower order is used as the second frequency, that is different from the frequency in the mode with flexural vibration. |
| Claim: |
4. The dynamic mode AFM apparatus according to claim 1, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and frequency detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
5. The dynamic mode AFM apparatus according to claim 1, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and phase detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
6. The dynamic mode AFM apparatus according to claim 1, wherein a signal source to generate an AC signal of a frequency that is a constant frequency around the resonance frequency of the mode or that is controlled to slowly follow the resonance frequency of the mode is used as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and the means for detecting the fluctuation of the resonance frequency is configured by detecting a phase of displacement or speed of the cantilever against the signal. |
| Claim: |
7. The dynamic mode AFM apparatus according to claim 2, wherein a frequency in a mode with flexural vibration of a lower order is used as the second frequency, that is different from the frequency in the mode with flexural vibration. |
| Claim: |
8. The dynamic mode AFM apparatus according to claim 7, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and frequency detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
9. The dynamic mode AFM apparatus according to claim 7, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and phase detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
10. The dynamic mode AFM apparatus according to claim 7, wherein a signal source to generate an AC signal of a frequency that is a constant frequency around the resonance frequency of the mode or that is controlled to slowly follow the resonance frequency of the mode is used as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and the means for detecting the fluctuation of the resonance frequency is configured by detecting a phase of displacement or speed of the cantilever against the signal. |
| Claim: |
11. The dynamic mode AFM apparatus according to claim 2, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and frequency detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
12. The dynamic mode AFM apparatus according to claim 3, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and frequency detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
13. The dynamic mode AFM apparatus according to claim 2, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and phase detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
14. The dynamic mode AFM apparatus according to claim 3, wherein a self-excited oscillation circuit which oscillates at the resonance frequency in the mode is configured as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and phase detection is used as the means for detecting the fluctuation of the resonance frequency. |
| Claim: |
15. The dynamic mode AFM apparatus according to claim 2, wherein a signal source to generate an AC signal of a frequency that is a constant frequency around the resonance frequency of the mode or that is controlled to slowly follow the resonance frequency of the mode is used as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and the means for detecting the fluctuation of the resonance frequency is configured by detecting a phase of displacement or speed of the cantilever against the signal. |
| Claim: |
16. The dynamic mode AFM apparatus according to claim 3, wherein a signal source to generate an AC signal of a frequency that is a constant frequency around the resonance frequency of the mode or that is controlled to slowly follow the resonance frequency of the mode is used as the means for generating the AC signal of the resonance frequency in the mode with flexural vibration of the cantilever, and the means for detecting the fluctuation of the resonance frequency is configured by detecting a phase of displacement or speed of the cantilever against the signal. |
| Current U.S. Class: |
850/5 |
| Current International Class: |
01 |
| رقم الانضمام: |
edspap.20110055983 |
| قاعدة البيانات: |
USPTO Patent Applications |