التفاصيل البيبلوغرافية
| العنوان: |
Electrostatic deflection system for corpuscular radiation |
| Document Number: |
20060192133 |
| تاريخ النشر: |
August 31, 2006 |
| Appl. No: |
11/346666 |
| Application Filed: |
February 03, 2006 |
| مستخلص: |
The invention is directed to electrostatic deflection systems for corpuscular beams which can be used particularly in microstructured and nanostructured applications in lithography installations or measuring equipment. According to the proposed object of the invention, the individual electrodes of a deflection system of this kind should permanently have and retain a very exact axially symmetric arrangement relative to one another. In the electrostatic deflection system according to the invention, rod-shaped electrodes are held in an axially symmetric arrangement in an inwardly hollow carrier through which a corpuscular beam can be directed. The carrier is formed of at least two, and at most four, carrier members which are connected to one another. |
| Inventors: |
Risse, Stefan (Jena, DE); Peschel, Thomas (Jena, DE); Damm, Christoph (Jena, DE); Gebhardt, Andreas (Apolda, DE); Rohde, Mathias (Jena, DE); Schenk, Christoph (Jena, DE); Elster, Thomas (Jena, DE); Doering, Hans-Joachim (Jena, DE); Schubert, Gerhard (Jena, DE) |
| Claim: |
1. An electrostatic deflection system for corpuscular beams, comprising: an axially symmetric arrangement in which rod-shaped electrodes are held in an inwardly hollow carrier through which an electron beam is directed; said carrier being formed of at least two, and at most four, carrier members which are connected to one another. |
| Claim: |
2. The deflection system according to claim 1, wherein the support areas for electrodes are provided at the carrier members, the electrodes being fixed to the support areas by material bonding. |
| Claim: |
3. The deflection system according to claim 1, wherein the support areas are formed at the ends of the carrier members. |
| Claim: |
4. The deflection system according to claim 1, wherein the support areas are constructed in a stair-shaped manner and the electrodes are arranged, respectively, so as to rest in a groove of a step in a defined manner in an axially symmetric arrangement. |
| Claim: |
5. The deflection system according to claim 1, wherein the grooves of the steps form a 90-degree V-groove. |
| Claim: |
6. The deflection system according to claim 1, wherein the electrodes are so oriented in the carrier members that their respective convex curvature is directed radially outward in relation to the longitudinal axis of the deflection system. |
| Claim: |
7. The deflection system according to claim 1, wherein at least one additional support area is arranged/formed between the support areas arranged at the end faces. |
| Claim: |
8. The deflection system according to claim 1, wherein the carrier members and the electrodes are formed of a dielectric material, and the carrier members are provided in their interior with an electrically conductive coating and the electrodes are provided on their exterior with an electrically conductive coating. |
| Claim: |
9. The deflection system according to claim 1, wherein the electrodes are connected to the carrier members at the support areas by material bonding so as to be electrically insulated. |
| Claim: |
10. The deflection system according to claim 1, wherein the electrodes are arranged on at least two different diameters in relation to the longitudinal axis of the deflection system. |
| Claim: |
11. The deflection system according to claim 1, wherein the electrodes are held in the carrier by different outer diameters. |
| Claim: |
12. The deflection system according to claim 1, wherein shielding flanges are arranged in the region of the support areas. |
| Claim: |
13. The deflection system according to claim 1, wherein two shielding flanges form outer terminations at the end faces and are connected by material bonding to the carrier members that have been connected to one another. |
| Claim: |
14. The deflection system according to claim 1, wherein electrical contact for the individual electrodes is integrated in or on one of the shielding flanges or is arranged at the latter. |
| Claim: |
15. The deflection system according to claim 1, wherein the electrodes are produced from a glass by a drawing process. |
| Claim: |
16. The deflection system according to claim 1, wherein the electrically conductive coating of the electrodes is formed of a layer system comprising a plurality of layers of different metals which are formed one above the other. |
| Claim: |
17. The deflection system according to claim 1, wherein the layer system is formed of titanium, platinum and gold. |
| Claim: |
18. The deflection system according to claim 1, wherein the carrier members are formed of glass ceramic and are provided in their interior with an electrically conductive coating comprising a nickel layer on which a layer of gold is formed. |
| Claim: |
19. The deflection system according to claim 1, wherein regions on which there is no electrically conductive coating are provided at the support areas so that the electrodes can be fastened to the carrier members so as to be electrically insulated. |
| Claim: |
20. The deflection system according to claim 1, wherein the electrodes are ground at an oblique angle on at least one end face. |
| Claim: |
21. The deflection system according to claim 1, wherein a mark indicating the orientation of the curvature of the electrodes is provided at the electrodes. |
| Current U.S. Class: |
25039/600R |
| Current International Class: |
01 |
| رقم الانضمام: |
edspap.20060192133 |
| قاعدة البيانات: |
USPTO Patent Applications |