Electronic Resource

Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals

التفاصيل البيبلوغرافية
العنوان: Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals
المؤلفون: Kurt, Hamza, Jonusauskas, Linas, Gailevicius, Darius, Sakalauskas, Danas, Hayran, Zeki, Turduev, Mirbek, Malinauskas, Mangirdas
بيانات النشر: Spie-Int Soc Optical Engineering 2021-09-11T15:44:37Z 2021-09-11T15:44:37Z 2017
نوع الوثيقة: Electronic Resource
مستخلص: In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - mu m) feature sizes out of SZ2080 hybrid material. Then, post-fabrication heating at 600 degrees C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.
The work was financially supported by NATO project grant No. SPS-985048 and European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP (EC-GA 654148).
SPIE, Nanoscribe GmbH
NATO projectNATO (North Atlantic Treaty Organisation) [SPS-985048]; European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP [EC-GA 654148]
مصطلحات الفهرس: thermal post-treatment, slow light, 3D lithography, ultrafast laser, polymers, hybrid organic-inorganic, photonic crystal, pyrolysis, Conference Object
URL: https://hdl.handle.net/20.500.11851/6972
https://doi.org/10.1117/12.2250537
Advanced Fabrication Technologies For Micro/Nano Optics And Photonics X
Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
الاتاحة: Open access content. Open access content
none
ملاحظة: English
Other Numbers: TRTET oai:gcris.etu.edu.tr:20.500.11851/6972
0277-786X
1996-756X
10115
WOS:000405595200032
2-s2.0-85019497401
10.1117/12.2250537
-
1427173530
المصدر المساهم: TOBB EKONOMI VE TEKNOLOJI UNIV
From OAIster®, provided by the OCLC Cooperative.
رقم الانضمام: edsoai.on1427173530
قاعدة البيانات: OAIster