Electronic Resource
Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals
العنوان: | Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals |
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المؤلفون: | Kurt, Hamza, Jonusauskas, Linas, Gailevicius, Darius, Sakalauskas, Danas, Hayran, Zeki, Turduev, Mirbek, Malinauskas, Mangirdas |
بيانات النشر: | Spie-Int Soc Optical Engineering 2021-09-11T15:44:37Z 2021-09-11T15:44:37Z 2017 |
نوع الوثيقة: | Electronic Resource |
مستخلص: | In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - mu m) feature sizes out of SZ2080 hybrid material. Then, post-fabrication heating at 600 degrees C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers. The work was financially supported by NATO project grant No. SPS-985048 and European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP (EC-GA 654148). SPIE, Nanoscribe GmbH NATO projectNATO (North Atlantic Treaty Organisation) [SPS-985048]; European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP [EC-GA 654148] |
مصطلحات الفهرس: | thermal post-treatment, slow light, 3D lithography, ultrafast laser, polymers, hybrid organic-inorganic, photonic crystal, pyrolysis, Conference Object |
URL: | Advanced Fabrication Technologies For Micro/Nano Optics And Photonics X Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı |
الاتاحة: | Open access content. Open access content none |
ملاحظة: | English |
Other Numbers: | TRTET oai:gcris.etu.edu.tr:20.500.11851/6972 0277-786X 1996-756X 10115 WOS:000405595200032 2-s2.0-85019497401 10.1117/12.2250537 - 1427173530 |
المصدر المساهم: | TOBB EKONOMI VE TEKNOLOJI UNIV From OAIster®, provided by the OCLC Cooperative. |
رقم الانضمام: | edsoai.on1427173530 |
قاعدة البيانات: | OAIster |
الوصف غير متاح. |