Academic Journal
Depth Profile Analysis of Polymerized Fluorine Compound on Photo-Resist Film with Angle-Resolved XPS
| العنوان: | Depth Profile Analysis of Polymerized Fluorine Compound on Photo-Resist Film with Angle-Resolved XPS / 角度分解XPS測定によるフォトレジスト膜表面重合フッ素化合物の深さ方向分析 |
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| المؤلفون: | Syuhei OINAKA, Toshio KUBOTA, Yoshitoki IIJIMA, 久保田 俊夫, 追中 脩平, 飯島 善時 |
| المصدر: | Ｘ線分析の進歩 / Advances in X-Ray Chemical Analysis, Japan. 2013, 44:121 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 09117806 27583651 |
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| DOI: | 10.57415/xshinpo.44.0_121 |