Academic Journal
Improvement in Thin Film Transfer in a 3D Microfabrication Method Using Surface Activated Bonding of Thin Films
| العنوان: | Improvement in Thin Film Transfer in a 3D Microfabrication Method Using Surface Activated Bonding of Thin Films / 薄膜の常温接合による微細3次元形状創成法における薄膜パターンの転写性改善 |
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| المؤلفون: | Hiroyuki Hotta, Mutsuya Takahashi, Takayuki Yamada, 堀田 宏之, 山田 高幸, 高橋 睦也 |
| المصدر: | Proceedings of JSPE Semestrial Meeting. 2003, :218 |
| قاعدة البيانات: | J-STAGE |
| DOI: | 10.11522/pscjspe.2003A.0.218.0 |
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