Academic Journal
ANNEALING CONCEPT FOR THE DESIGN OF ENVIRONMENTALLY STABLE CHEMICAL AMPLIFICATION RESISTS
| العنوان: | ANNEALING CONCEPT FOR THE DESIGN OF ENVIRONMENTALLY STABLE CHEMICAL AMPLIFICATION RESISTS |
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| المؤلفون: | Don HOFER, Greg BREYTA, Hiroshi ITO, R. SOORIYAKUMARAN |
| المصدر: | Journal of Photopolymer Science and Technology. 1995, 8(4):505 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 09149244 13496336 |
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| DOI: | 10.2494/photopolymer.8.505 |