Academic Journal
The Physics of EUV Photoresist and How It Drives Strategies for Improvement
| العنوان: | The Physics of EUV Photoresist and How It Drives Strategies for Improvement |
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| المؤلفون: | Karen Petrillo, Kyoungyong Cho, Neisser Mark |
| المصدر: | Journal of Photopolymer Science and Technology. 2012, 25(1):87 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 09149244 13496336 |
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| DOI: | 10.2494/photopolymer.25.87 |