Academic Journal
Two-dimensional Dopant Profile Measurements by Scanning Capacitance Microscopy
| العنوان: | Two-dimensional Dopant Profile Measurements by Scanning Capacitance Microscopy |
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| المؤلفون: | Aritoshi SUGIMOTO, Eriko MINEO, Maki KUBO, Masatoshi NAKAZAWA |
| المصدر: | Hyomen Kagaku. 1999, 20(1):27 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 03885321 18814743 |
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| DOI: | 10.1380/jsssj.20.27 |