Academic Journal
Observation of growth process of thin film on heated substrate by using resistive spectroscopy
| العنوان: | Observation of growth process of thin film on heated substrate by using resistive spectroscopy / 加熱された基板上での薄膜形成過程の抵抗スペクトロスコピー法による観察 |
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| المؤلفون: | Hirotsugu OGI, Kento KASHIUCHI, Nobutomo NAKAMURA, Ryuuichi TARUMI, 中村 暢伴, 垂水 竜一, 樫内 健人, 荻 博次 |
| المصدر: | The Proceedings of Mechanical Engineering Congress, Japan. 2020, :04109 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 24242667 |
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| DOI: | 10.1299/jsmemecj.2020.J04109 |