Academic Journal
208 Observation of Selective Polishing or Finishing Control Using High Molecular Liquid Crystalline Polymer on Unilateral (One-Sided) Pattern Electrodes with AFM
| العنوان: | 208 Observation of Selective Polishing or Finishing Control Using High Molecular Liquid Crystalline Polymer on Unilateral (One-Sided) Pattern Electrodes with AFM / 208 高分子液晶を用いた片側パターン電極による研磨効果のAFMによる観察(GS-13 加工(2)) |
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| المؤلفون: | Akio Inoue, Junji FURUSHO, Junsuke Fujiwara, Michihiro Kimura, Ryouhei Kawamuki, Takehito kikuchi, 井上 昭夫, 古荘 純次, 川向 良平, 木村 道廣, 菊池 武士, 藤原 順介 |
| المصدر: | The Proceedings of Conference of Kansai Branch. 2004, 15 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 24242756 |
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| DOI: | 10.1299/jsmekansai.2004.79._2-15_ |