Academic Journal
Thermal field control by using multi-insulators with different thermal conductivities during RF-TSSG SiC crystal growth
| العنوان: | Thermal field control by using multi-insulators with different thermal conductivities during RF-TSSG SiC crystal growth / 異なる熱伝導率を有する複数の断熱材を用いたRF-TSSG法によるSiC結晶成長時の温度場制御 |
|---|---|
| المؤلفون: | Atsushi Sekimoto, Lei Wang, Toru Ujihara, Yasunori Okano, Yuto TAkehara, ワン レイ, 宇治原 徹, 岡野 泰則, 竹原 悠人, 関本 敦 |
| المصدر: | JSAP Annual Meetings Extended Abstracts. 2020, :2968 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 24367613 |
|---|---|
| DOI: | 10.11470/jsapmeeting.2020.1.0_2968 |