Academic Journal
High Purity SiGe Crystal Growth by the TLZ Method
| العنوان: | High Purity SiGe Crystal Growth by the TLZ Method / TLZ法による高純度SiGe結晶育成 |
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| المؤلفون: | Hidehiko Yoda, Kyoichi Kinoshita, Tatsuro Maeda, Yasunori Sato, Yasutomo Arai, 佐藤 靖則, 依田 秀彦, 前田 辰郎, 木下 恭一, 荒井 康智 |
| المصدر: | JSAP Annual Meetings Extended Abstracts. 2017, :3323 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 24367613 |
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| DOI: | 10.11470/jsapmeeting.2017.1.0_3323 |