Academic Journal
Dependence of defect density on Si-layer thickness in Si/SiO2 multilayer films
| العنوان: | Dependence of defect density on Si-layer thickness in Si/SiO2 multilayer films / Si/SiO2多層膜における欠陥密度のSi層厚依存性 |
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| المؤلفون: | Naoki Matsuo, Shigeru Yamada, Takashi Itoh, Yuki Nishi, Yuto Ebata, 伊藤 貴司, 山田 繁, 松尾 直紀, 江畑 裕登, 西 悠貴 |
| المصدر: | Proceedings of the Annual Meeting of the Japan Photovoltaic Society. 2021, :58 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 24366498 |
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| DOI: | 10.57295/jpvsproc.1.0_58 |