Academic Journal
Line Width Control on Laser Beam Writing (2nd Report) Line Width Control by Defocusing
| العنوان: | Line Width Control on Laser Beam Writing (2nd Report) Line Width Control by Defocusing / レーザビーム描画における露光線幅の制御(第2報) |
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| المؤلفون: | Hajime ONDA, 恩田 一 |
| المصدر: | 精密工学会誌 / Journal of the Japan Society for Precision Engineering. 1999, 65(8):1158 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 09120289 1882675X |
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| DOI: | 10.2493/jjspe.65.1158 |