Academic Journal
Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films
| العنوان: | Enhancement of crystal anisotropy and ferroelectricity by decreasing thickness in (Al,Sc)N films |
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| المؤلفون: | Hiroshi Funakubo, Hiroshi Yamada, Ken Nishida, Masato Uehara, Morito Akiyama, Osami Sakata, Reika Ota, Ryoichi Mizutani, Shinnosuke Yasuoka, Shintaro Yasui, Takahisa Shiraishi, Takao Shimizu, Yasuhiko Imai, Yoshitaka Ehara |
| المصدر: | Journal of the Ceramic Society of Japan. 2022, 130(7):436 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 13486535 18820743 |
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| DOI: | 10.2109/jcersj2.21184 |