Academic Journal
Effect of Substrate Temperature on a-Si:H Thin Films Fa-bricated by Double Tubed Coaxial Line Type Microwave Plasma CYD
| العنوان: | Effect of Substrate Temperature on a-Si:H Thin Films Fa-bricated by Double Tubed Coaxial Line Type Microwave Plasma CYD |
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| المؤلفون: | Isamu Kato, Kazuhisa Hatanaka, Tetsuya Ueda |
| المصدر: | The transactions of the Institute of Electrical Engineers of Japan.A. 1986, 106(8):391 |
| قاعدة البيانات: | J-STAGE |
| تدمد: | 03854205 13475533 |
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| DOI: | 10.1541/ieejfms1972.106.391 |