Academic Journal
Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets
| العنوان: | Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets |
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| المؤلفون: | Hiroharu Kawasaki, Shin-ichi Aoqui, Takahiko Satake |
| المصدر: | e-Journal of Surface Science and Nanotechnology. 2023, 21(3):218 |
| قاعدة البيانات: | J-STAGE |
Full Text Finder | تدمد: | 13480391 |
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| DOI: | 10.1380/ejssnt.2023-021 |