Academic Journal

Characterizing Ferroelectric Properties of Hf0.5Zr0.5O2 From Deep-Cryogenic Temperature (4 K) to 400 K

التفاصيل البيبلوغرافية
العنوان: Characterizing Ferroelectric Properties of Hf0.5Zr0.5O2 From Deep-Cryogenic Temperature (4 K) to 400 K
المؤلفون: Jae Hur, Yuan-Chun Luo, Zheng Wang, Sarah Lombardo, Asif Islam Khan, Shimeng Yu
المصدر: IEEE Journal on Exploratory Solid-State Computational Devices and Circuits, Vol 7, Iss 2, Pp 168-174 (2021)
بيانات النشر: IEEE, 2021.
سنة النشر: 2021
المجموعة: LCC:Computer engineering. Computer hardware
مصطلحات موضوعية: Cryogenic temperature, device reliability, ferroelectric, ferroelectric field-effect transistor (FeFET), ferroelectric random access memory (FeRAM), Hf0.5Zr0.5O2 (HZO), Computer engineering. Computer hardware, TK7885-7895
الوصف: Ferroelectric Hf0.5Zr0.5O2 (HZO) thin film has obtained considerable attention for emerging non-volatile memory (eNVM) and synaptic device applications. To our best knowledge, the polarization switching of HZO has not been comprehensively investigated in wide-ranging temperatures from deep-cryogenic 4 K to elevated temperature 400 K within the same set of test structures. In this work, we experimentally characterize the reliability effects such as endurance (wake-up, fatigue, and breakdown), retention (including imprint), and small-signal response of the HZO capacitor from the lowest temperature reported (4 K) to the elevated temperature (400 K). We demonstrate one of the highest endurance cycles $ > 3.5\times 10^{10}$ among reported TiN/HZO/TiN capacitors with negligible wake-up/fatigue effects or retention degradation, all obtained at 4 K. Based on the experimental results, we further simulated ferroelectric random access memory (FeRAM) and ferroelectric field-effect transistor (FeFET) to evaluate their potentials as cryogenic memories.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 2329-9231
Relation: https://ieeexplore.ieee.org/document/9627158/; https://doaj.org/toc/2329-9231
DOI: 10.1109/JXCDC.2021.3130783
URL الوصول: https://doaj.org/article/eaf1046bc0d94e6a985458b021b89d78
رقم الانضمام: edsdoj.f1046bc0d94e6a985458b021b89d78
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:23299231
DOI:10.1109/JXCDC.2021.3130783