Academic Journal

In situ fragmentation of Al/Al2O3 multilayers on flexible substrates in biaxial tension

التفاصيل البيبلوغرافية
العنوان: In situ fragmentation of Al/Al2O3 multilayers on flexible substrates in biaxial tension
المؤلفون: Barbara Putz, Thomas E.J. Edwards, Emese Huszar, Laszlo Pethö, Patrice Kreiml, Megan J. Cordill, Dominique Thiaudiere, Stephane Chiroli, Fatih Zighem, Damien Faurie, Pierre-Olivier Renault, Johann Michler
المصدر: Materials & Design, Vol 232, Iss , Pp 112081- (2023)
بيانات النشر: Elsevier, 2023.
سنة النشر: 2023
المجموعة: LCC:Materials of engineering and construction. Mechanics of materials
مصطلحات موضوعية: Al – Al2O3 multilayers, X-ray Diffraction, Flexible Substrates, Mechanical Properties, Fragmentation, Tensile Testing, Materials of engineering and construction. Mechanics of materials, TA401-492
الوصف: A unique deposition approach combining atomic layer deposition (ALD) and magnetron sputtering was used to fabricate a series of thin film multilayer structures of Al (50 nm) and Al2O3 (ALD, 2.4–9.4 nm) on flexible polymer substrates without breaking vacuum. The multilayers together with 50 nm and 150 nm Al reference films were analyzed by cross-sectional TEM analysis and experimentally strained in biaxial tension to investigate their deformation behavior. Al film stresses and peak widths, measured in situ with Synchrotron X-ray diffraction, are in good agreement with post-mortem surface SEM and through-thickness FIB analysis of the multilayers. It was revealed that brittle cracking of the multilayer can be avoided, and that the lateral and through-thickness crack resistance improve as a function of decreasing oxide layer thickness. An attempt to model the full biaxial yield surface of the multilayers, which remains experimentally challenging, appears to be valid up to 2.4 nm oxide thickness. Model predictions are further compared to compression data, obtained from the unloading segments of the tensile tests. Describing the mechanical behaviour under multiaxial stress conditions is of utmost importance for a diverse understanding of these multilayers across a variety of potential carrier systems and loading cases.
نوع الوثيقة: article
وصف الملف: electronic resource
اللغة: English
تدمد: 0264-1275
Relation: http://www.sciencedirect.com/science/article/pii/S0264127523004963; https://doaj.org/toc/0264-1275
DOI: 10.1016/j.matdes.2023.112081
URL الوصول: https://doaj.org/article/996a783a30b24c239f30f2b793459869
رقم الانضمام: edsdoj.996a783a30b24c239f30f2b793459869
قاعدة البيانات: Directory of Open Access Journals
الوصف
تدمد:02641275
DOI:10.1016/j.matdes.2023.112081