التفاصيل البيبلوغرافية
| العنوان: |
Magnetic Properties of Amorphous Ta/CoFeB/MgO/Ta Thin Films on Deformable Substrates with Magnetic Field Angle and Tensile Strain |
| المؤلفون: |
Ah Hyun Jun, Young Hyun Hwang, Byeongwoo Kang, Seungwon Lee, Jiwon Seok, Jong Seong Lee, Seo Hyun Song, Byeong-Kwon Ju |
| المصدر: |
Sensors, Vol 23, Iss 17, p 7479 (2023) |
| بيانات النشر: |
MDPI AG, 2023. |
| سنة النشر: |
2023 |
| المجموعة: |
LCC:Chemical technology |
| مصطلحات موضوعية: |
magnetic sensors, in-plane angle sensors, CoFeB, biaxial, four-fold, deformable, Chemical technology, TP1-1185 |
| الوصف: |
Recently, the application of cobalt iron boron (CoFeB) thin films in magnetic sensors has been widely studied owing to their high magnetic moment, anisotropy, and stability. However, most of these studies were conducted on rigid silicon substrates. For diverse applications of magnetic and angle sensors, it is important to explore the properties of ferromagnetic thin films grown on nonrigid deformable substrates. In this study, representative deformable substrates (polyimide (PI), polyethylene naphthalate (PEN), and polydimethylsiloxane (PDMS)), which can be bent or stretched, were used to assess the in-plane magnetic field angle-dependent properties of amorphous Ta/CoFeB/MgO/Ta thin films grown on deformable substrates. The effects of substrate roughness, tensile stress, deformable substrate characteristics, and sputtering on magnetic properties, such as the coercive field (Hc), remanence over saturation magnetization (Mr/Ms), and biaxial characteristics, were investigated. This study presents an unconventional foundation for exploring deformable magnetic sensors capable of detecting magnetic field angles. |
| نوع الوثيقة: |
article |
| وصف الملف: |
electronic resource |
| اللغة: |
English |
| تدمد: |
1424-8220 |
| Relation: |
https://www.mdpi.com/1424-8220/23/17/7479; https://doaj.org/toc/1424-8220 |
| DOI: |
10.3390/s23177479 |
| URL الوصول: |
https://doaj.org/article/826b93ae9172418e96e751024c7e9356 |
| رقم الانضمام: |
edsdoj.826b93ae9172418e96e751024c7e9356 |
| قاعدة البيانات: |
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