Academic Journal
Electrical and thermal characterisation of liquid metal thin-film Ga $$_2$$ 2 O $$_3$$ 3 –SiO $$_2$$ 2 heterostructures
العنوان: | Electrical and thermal characterisation of liquid metal thin-film Ga $$_2$$ 2 O $$_3$$ 3 –SiO $$_2$$ 2 heterostructures |
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المؤلفون: | Alexander Petkov, Abhishek Mishra, Mattia Cattelan, Daniel Field, James Pomeroy, Martin Kuball |
المصدر: | Scientific Reports, Vol 13, Iss 1, Pp 1-7 (2023) |
بيانات النشر: | Nature Portfolio, 2023. |
سنة النشر: | 2023 |
المجموعة: | LCC:Medicine LCC:Science |
مصطلحات موضوعية: | Medicine, Science |
الوصف: | Abstract Heterostructures of Ga $$_2$$ 2 O $$_3$$ 3 with other materials such as Si, SiC or diamond, are a possible way of addressing the low thermal conductivity and lack of p-type doping of Ga $$_2$$ 2 O $$_3$$ 3 for device applications, as well as of improving device reliability. In this work we study the electrical and thermal properties of Ga $$_2$$ 2 O $$_3$$ 3 –SiO $$_2$$ 2 heterostructures. Here, thin-film gallium oxide with thickness ranging between 8 and 30 nm was deposited onto a silicon substrate with a thermal oxide by means of oxidised liquid gallium layer delamination. The resulting heterostructure is then characterised by means of X-ray photoelectron spectroscopy and transient thermoreflectance. The thin-film gallium oxide valence band offset with respect to the SiO $$_2$$ 2 is measured as 0.1 eV and predicted as $$-2.3$$ - 2.3 eV with respect to diamond. The thin-film’s out-of-plane thermal conductivity is determined to be 3 ±0.5 Wm $$^{-1}$$ - 1 K $$^{-1}$$ - 1 , which is higher than what has been previously measured for other polycrystalline Ga $$_2$$ 2 O $$_3$$ 3 films of comparable thickness. |
نوع الوثيقة: | article |
وصف الملف: | electronic resource |
اللغة: | English |
تدمد: | 2045-2322 |
Relation: | https://doaj.org/toc/2045-2322 |
DOI: | 10.1038/s41598-023-30638-4 |
URL الوصول: | https://doaj.org/article/795b98944ca8438fad6f83a9842d2dfe |
رقم الانضمام: | edsdoj.795b98944ca8438fad6f83a9842d2dfe |
قاعدة البيانات: | Directory of Open Access Journals |
تدمد: | 20452322 |
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DOI: | 10.1038/s41598-023-30638-4 |