Academic Journal
Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition
| العنوان: | Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition |
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| المؤلفون: | CHEN Liangcai, YIN Xiang, WANG Qingchun, LONG Lianchun |
| المصدر: | Cailiao Baohu, Vol 57, Iss 11, Pp 110-117 (2024) |
| بيانات النشر: | Editorial Department of Materials Protection, 2024. |
| سنة النشر: | 2024 |
| المجموعة: | LCC:Materials of engineering and construction. Mechanics of materials LCC:Technology |
| مصطلحات موضوعية: | chemical vapor deposition；silicon carbide；antioxidant；numerical simulation；process control, Materials of engineering and construction. Mechanics of materials, TA401-492, Technology |
| الوصف: | Silicon carbide (SiC) coatings prepared by chemical vapor deposition (CVD) are an ideal choice for oxidation-resistant coatings on surface of carbon-based materials，and the processes directly affect the deposition results of the coatings.In order to guide the process control of high-temperature oxidation-resistant SiC coatings on carbon/carbon (C/C) composites，a simulation model of the deposition furnace for preparing SiC coatings by the CVD method was established.Numerical simulations of the deposition process were conducted using computational fluid dynamics (CFD) software to investigate the effects of workpiece placement and key process parameters on the deposition results.Additionally，the influences of the main process parameters were quantified，and the combinations of process parameters were optimized.Results showed that the established finite element analysis model was reasonable and reliable.The placement and spacing of the workpieces were collaboratively affected by the deposition results.Within the range of process parameters，deposition uniformity was significantly impacted by temperature，with an influence degree of 28.39%.This was followed by pressure，with an influence degree of 13.90%，while the flow rate of the reactant methyltrichlorosilane (MTS) was found to have the least impact，at 6.43%.Furthermore，deposition uniformity was improved as temperature and pressure were decreased and the MTS flow rate was increased.Based on these influence patterns，process optimization revealed an increase in deposition uniformity of 102.45%. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | Chinese |
| تدمد: | 1001-1560 |
| Relation: | http://www.mat-pro.com/fileup/1001-1560/PDF/20241113.pdf; https://doaj.org/toc/1001-1560 |
| DOI: | 10.16577/j.issn.1001-1560.2024.0255 |
| URL الوصول: | https://doaj.org/article/58922d5bfe244b2f8ffe64531c89bb59 |
| رقم الانضمام: | edsdoj.58922d5bfe244b2f8ffe64531c89bb59 |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 10011560 |
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| DOI: | 10.16577/j.issn.1001-1560.2024.0255 |