Academic Journal
Iridium wire grid polarizer fabricated using atomic layer deposition
| العنوان: | Iridium wire grid polarizer fabricated using atomic layer deposition |
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| المؤلفون: | Knez Mato, Weber Thomas, Käsebier Thomas, Szeghalmi Adriana, Kley Ernst-Bernhard, Tünnermann Andreas |
| المصدر: | Nanoscale Research Letters, Vol 6, Iss 1, p 558 (2011) |
| بيانات النشر: | SpringerOpen, 2011. |
| سنة النشر: | 2011 |
| المجموعة: | LCC:Materials of engineering and construction. Mechanics of materials |
| مصطلحات موضوعية: | optics, nanostructure fabrication, polarizing devices, Materials of engineering and construction. Mechanics of materials, TA401-492 |
| الوصف: | Abstract In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on its good optical properties and a superior oxidation resistance. Furthermore, atomic layer deposition of iridium allows a precise adjustment of the structural parameters of the grating much better than other deposition techniques like sputtering for example. At the target wavelength of 250 nm, a transmission of about 45% and an extinction ratio of 87 are achieved. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 1931-7573 1556-276X |
| Relation: | http://www.nanoscalereslett.com/content/6/1/558; https://doaj.org/toc/1931-7573; https://doaj.org/toc/1556-276X |
| URL الوصول: | https://doaj.org/article/e55b812d099b494aa085aa5ca2c85ac3 |
| رقم الانضمام: | edsdoj.55b812d099b494aa085aa5ca2c85ac3 |
| قاعدة البيانات: | Directory of Open Access Journals |
Full Text Finder | تدمد: | 19317573 1556276X |
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