Academic Journal
Comparative Study of Three SAW Configurations for Temperature Sensing
| العنوان: | Comparative Study of Three SAW Configurations for Temperature Sensing |
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| المؤلفون: | Serhane R., Belkhelfa N. |
| المصدر: | Engineering and Technology Journal, Vol 41, Iss 8, Pp 1068-1081 (2023) |
| بيانات النشر: | Unviversity of Technology- Iraq, 2023. |
| سنة النشر: | 2023 |
| المجموعة: | LCC:Science LCC:Technology |
| مصطلحات موضوعية: | coupling factor, frequency response, sensors, surface acoustic wave, tcf, Science, Technology |
| الوصف: | This paper demonstrates three SAW configurations' electrical and mechanical behaviors: a one-port resonator, a two-port resonator, and a delay line that works as temperature sensors of around 440 MHz characteristic frequencies. We investigate the sensitivity of the sensors for temperatures up to 200 °C. A linear behavior of the frequency shift versus temperature is observed; the resulting sensitivity of the sensors is evaluated at 22.74 ppm/°C for the one-port resonator, 23.17 for the two-port resonator, and 3.83 ns/°C for the delay line structure. The electromechanical coupling coefficient (k2) is 0.492 % for the delay line, 0.489 % for the one-port resonator, and 0.55% for the two-port resonator. The quality factor QFactor calculated from Y11 electrical input admittance is 2858 for the one-port resonator, 2977 for the delay line, and 2903 for the two-port resonator. The optimized piezoelectric layer thickness value, for the one port resonator, is hAlN=1.5µm. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 1681-6900 2412-0758 |
| Relation: | https://etj.uotechnology.edu.iq/article_177206_b9f6761d116ec2589f1bfc8527cf8b33.pdf; https://doaj.org/toc/1681-6900; https://doaj.org/toc/2412-0758 |
| DOI: | 10.30684/etj.2023.137423.1346 |
| URL الوصول: | https://doaj.org/article/5441e7ef709e4b3ea101a0880ade7dda |
| رقم الانضمام: | edsdoj.5441e7ef709e4b3ea101a0880ade7dda |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 16816900 24120758 |
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| DOI: | 10.30684/etj.2023.137423.1346 |