التفاصيل البيبلوغرافية
| العنوان: |
A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO3 with Arc-Shaped Electrodes |
| المؤلفون: |
Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Chengliang Sun |
| المصدر: |
Micromachines, Vol 15, Iss 11, p 1367 (2024) |
| بيانات النشر: |
MDPI AG, 2024. |
| سنة النشر: |
2024 |
| المجموعة: |
LCC:Mechanical engineering and machinery |
| مصطلحات موضوعية: |
XBAR, arc-shaped electrode, electromechanical coupling coefficient, spurious modes, Mechanical engineering and machinery, TJ1-1570 |
| الوصف: |
High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO3 thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO3 thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO3 thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. |
| نوع الوثيقة: |
article |
| وصف الملف: |
electronic resource |
| اللغة: |
English |
| تدمد: |
2072-666X |
| Relation: |
https://www.mdpi.com/2072-666X/15/11/1367; https://doaj.org/toc/2072-666X |
| DOI: |
10.3390/mi15111367 |
| URL الوصول: |
https://doaj.org/article/431da56a57b24cf7bebd6f2b113336a5 |
| رقم الانضمام: |
edsdoj.431da56a57b24cf7bebd6f2b113336a5 |
| قاعدة البيانات: |
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