Academic Journal
Influence of grounded electrode area on breakdown current in RF capcitively coupled plasma
| العنوان: | Influence of grounded electrode area on breakdown current in RF capcitively coupled plasma |
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| المؤلفون: | Moyad A. Ahmad |
| المصدر: | Iraqi Journal of Physics, Vol 10, Iss 17 (2012) |
| بيانات النشر: | University of Baghdad, 2012. |
| سنة النشر: | 2012 |
| المجموعة: | LCC:Physics |
| مصطلحات موضوعية: | Plasma, argon, rf-discharge, Breakdown, Physics, QC1-999 |
| الوصف: | The influence of the grounded electrode area on the ignition voltage in capcitively coupled radio frequency discharge at 13.56 MHz in argon gas is studied experimentally. The results indicate a systematic decrease of the breakdown voltage with increasing grounded electrode area for the same pd value. Results show that the secondary ionization coefficient γ increases with the increase of grounded electrode area. Furthermore, results also the discharge current at the breakdown voltage increases almost linearly with the increase of electrode area suggesting an almost constant current density. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 2070-4003 2664-5548 |
| Relation: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/778; https://doaj.org/toc/2070-4003; https://doaj.org/toc/2664-5548 |
| URL الوصول: | https://doaj.org/article/40bc0b8419934e88a780c802b9129031 |
| رقم الانضمام: | edsdoj.40bc0b8419934e88a780c802b9129031 |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 20704003 26645548 |
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