Academic Journal
Study of Laminated Composite MEMS and NEMS Performance in Nano Metric Operations
| العنوان: | Study of Laminated Composite MEMS and NEMS Performance in Nano Metric Operations |
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| المؤلفون: | Sadegh Sadeghzadeh, Moharram Habibnejad Korayem, Ahmad Homayooni |
| المصدر: | Mechanics of Advanced Composite Structures, Vol 4, Iss 1, Pp 19-31 (2017) |
| بيانات النشر: | Semnan University, 2017. |
| سنة النشر: | 2017 |
| المجموعة: | LCC:Mechanics of engineering. Applied mechanics |
| مصطلحات موضوعية: | laminated composite, mems and nems, gdqm, gdqem, nano-manipulation, Mechanics of engineering. Applied mechanics, TA349-359 |
| الوصف: | Precision of nano-metric operations is an important issue in nano-engineering studies. Several operative parameters might affect the quality of results. The parameters of the nano world are significant but not entirely controllable. However, the geometrical and mechanical properties of micro cantilevers are completely controllable. So, controlling the sensitivity of resulting image through t lamination design could be a proper approach. This paper analyses the effects of composite lamination on the performance of common Micro and Nano Electro Mechanical systems (MEMS and NEMS, respectively). Generalized Differential Quadrature (GDQ) and Generalized Differential Quadrature Element (GDQE) methods are used as semi-analytic solutions for regular and irregular domains, respectively. Validity, applicability and accuracy of the proposed approach are demonstrated and then the lamination effects on the nano-imaging and manipulation of nano particles by micro cantilevers are studied. This study shows that some laminations of micro cantilevers resulted in a better performance in nano-manipulation and imaging. Furthermore, clarifying the dependency of system sensitivity on the profile of the substrate is remarkable. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 2423-4826 2423-7043 |
| Relation: | https://macs.semnan.ac.ir/article_495_f35307a1fdd13aa89d258769c988f59b.pdf; https://doaj.org/toc/2423-4826; https://doaj.org/toc/2423-7043 |
| DOI: | 10.22075/macs.2016.495 |
| URL الوصول: | https://doaj.org/article/c1e84bc9920b409993db28c39bd71257 |
| رقم الانضمام: | edsdoj.1e84bc9920b409993db28c39bd71257 |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 24234826 24237043 |
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| DOI: | 10.22075/macs.2016.495 |