Academic Journal
Laser-dilatometer calibration using a single-crystal silicon sample
| العنوان: | Laser-dilatometer calibration using a single-crystal silicon sample |
|---|---|
| المؤلفون: | Ines Hamann, Josep Sanjuan, Ruven Spannagel, Martin Gohlke, Gudrun Wanner, Sönke Schuster, Felipe Guzman, Claus Braxmaier |
| المصدر: | International Journal of Optomechatronics, Vol 13, Iss 1, Pp 18-29 (2019) |
| بيانات النشر: | Taylor & Francis Group, 2019. |
| سنة النشر: | 2019 |
| المجموعة: | LCC:Materials of engineering and construction. Mechanics of materials LCC:Applied optics. Photonics |
| مصطلحات موضوعية: | dilatometry, silicon, differential wavefront sensing, simulation, Materials of engineering and construction. Mechanics of materials, TA401-492, Applied optics. Photonics, TA1501-1820 |
| الوصف: | Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%. |
| نوع الوثيقة: | article |
| وصف الملف: | electronic resource |
| اللغة: | English |
| تدمد: | 1559-9612 1559-9620 15599612 |
| Relation: | https://doaj.org/toc/1559-9612; https://doaj.org/toc/1559-9620 |
| DOI: | 10.1080/15599612.2019.1587117 |
| URL الوصول: | https://doaj.org/article/cca0cdea2f6d4733a6b0f6ed4d2d044a |
| رقم الانضمام: | edsdoj.0cdea2f6d4733a6b0f6ed4d2d044a |
| قاعدة البيانات: | Directory of Open Access Journals |
| تدمد: | 15599612 15599620 |
|---|---|
| DOI: | 10.1080/15599612.2019.1587117 |