التفاصيل البيبلوغرافية
العنوان: |
Design and Analysis of Quartz Crystal Microbalance with a New Ring-Shaped Interdigital Electrode |
المؤلفون: |
Pengyi Wang, Mingxiang Ling, Minghai Li |
المصدر: |
Sensors; Volume 22; Issue 19; Pages: 7422 |
بيانات النشر: |
Multidisciplinary Digital Publishing Institute |
سنة النشر: |
2022 |
المجموعة: |
MDPI Open Access Publishing |
مصطلحات موضوعية: |
quartz crystal microbalance, interdigital electrode, uniform mass sensitivity, high quality factor |
الوصف: |
In this paper, a new type of ring-shaped interdigital electrode is proposed to improve the accuracy and repeatability of quartz crystal microbalance. The influence of different types of single finger, dot finger, dot double-finger electrodes on mass sensitivity distribution as well as the optimal proportion of finger and gap width are obtained through multi-physical coupling simulation. The results show that the design criteria of interdigital electrodes will not change with the increase in the number of fingers. The gap width should obey the decrease order from central to edge and be about twice the width of finger. The width of the outermost finger and the radius of the middle dot electrode should be maintained at about 0.4 and 0.2 times of the total electrode radius. An experiment was carried out to verify that the quartz wafer with a dot double-finger electrode has high quality factors and less modal coupling, which can satisfy the engineering application well. As a conclusion, this study provides a design idea for the electrode to maintain a uniform distribution of quartz crystal microbalance mass sensitivity. |
نوع الوثيقة: |
text |
وصف الملف: |
application/pdf |
اللغة: |
English |
Relation: |
Chemical Sensors; https://dx.doi.org/10.3390/s22197422 |
DOI: |
10.3390/s22197422 |
الاتاحة: |
https://doi.org/10.3390/s22197422 |
Rights: |
https://creativecommons.org/licenses/by/4.0/ |
رقم الانضمام: |
edsbas.F1668C4D |
قاعدة البيانات: |
BASE |