Academic Journal
Sensitive multi-element profiling with high depth resolution enabled by time-of-flight recoil detection in transmission using pulsed keV ion beams
العنوان: | Sensitive multi-element profiling with high depth resolution enabled by time-of-flight recoil detection in transmission using pulsed keV ion beams |
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المؤلفون: | Holeňák, R., Lohmann, S., Primetzhofer, D. |
المصدر: | Vacuum ; volume 204, page 111343 ; ISSN 0042-207X |
بيانات النشر: | Elsevier BV |
سنة النشر: | 2022 |
المجموعة: | ScienceDirect (Elsevier - Open Access Articles via Crossref) |
نوع الوثيقة: | article in journal/newspaper |
اللغة: | English |
DOI: | 10.1016/j.vacuum.2022.111343 |
الاتاحة: | http://dx.doi.org/10.1016/j.vacuum.2022.111343 https://api.elsevier.com/content/article/PII:S0042207X22004663?httpAccept=text/xml https://api.elsevier.com/content/article/PII:S0042207X22004663?httpAccept=text/plain |
Rights: | https://www.elsevier.com/tdm/userlicense/1.0/ ; http://creativecommons.org/licenses/by/4.0/ |
رقم الانضمام: | edsbas.EB73B2D |
قاعدة البيانات: | BASE |
DOI: | 10.1016/j.vacuum.2022.111343 |
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