Computational Depth-resolved Imaging and Metrology

التفاصيل البيبلوغرافية
العنوان: Computational Depth-resolved Imaging and Metrology
المؤلفون: Du, Mengqi
المصدر: Du , M 2021 , ' Computational Depth-resolved Imaging and Metrology ' , PhD , Vrije Universiteit Amsterdam , Amsterdam .
سنة النشر: 2021
مصطلحات موضوعية: Computational imaging, Lensless imaging, Ptychography, Optical coherence tomography, Coherent diffractive imaging, Depth-resolved, Metrology, Surface roughness, 3D imaging
الوصف: In this thesis, the main research challenge boils down to extracting 3D spatial information of an object from 2D measurements using light. Our goal is to achieve depth-resolved tomographic imaging of transparent or semi-transparent 3D objects, and to perform topography characterization of rough surfaces. The essential tool we used is computational imaging, where depending on the experimental scheme, often indirect measurements are taken, and tailored algorithms are employed to perform image reconstructions. The computational imaging approach enables us to relax the hardware requirement of an imaging system, which is essential when using light in the EUV and x-ray regimes, where high-quality optics are not readily available. In this thesis, visible and infrared light sources are used, where computational imaging also offers several advantages. First of all, it often leads to a simple, flexible imaging system with low cost. In the case of a lensless configuration, where no lenses are involved in the final image-forming stage between the object and the detector, aberration-free image reconstructions can be obtained. More importantly, computational imaging provides quantitative reconstructions of scalar electric fields, enabling phase imaging, numerical refocus, as well as 3D imaging.
نوع الوثيقة: book
وصف الملف: application/pdf
اللغة: English
الاتاحة: https://research.vu.nl/en/publications/d7bee925-2868-4683-945d-533d0a493ace
https://hdl.handle.net/1871.1/d7bee925-2868-4683-945d-533d0a493ace
https://research.vu.nl/ws/files/129674710/M%20%20Du%20-%20thesis.pdf
https://research.vu.nl/ws/files/129674712/M%20%20Du%20-%20cover.pdf
https://research.vu.nl/ws/files/129674714/M%20%20Du%20-%20title_page.pdf
Rights: info:eu-repo/semantics/openAccess
رقم الانضمام: edsbas.D125ED5
قاعدة البيانات: BASE