Academic Journal
Piezoelectric measurements with atomic force microscopy
العنوان: | Piezoelectric measurements with atomic force microscopy |
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المؤلفون: | Christman, J. A., Woolcott, R. R., Kingon, A. I., Nemanich, R. J. |
المصدر: | Applied Physics Letters ; volume 73, issue 26, page 3851-3853 ; ISSN 0003-6951 1077-3118 |
بيانات النشر: | AIP Publishing |
سنة النشر: | 1998 |
الوصف: | An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films. |
نوع الوثيقة: | article in journal/newspaper |
اللغة: | English |
DOI: | 10.1063/1.122914 |
الاتاحة: | http://dx.doi.org/10.1063/1.122914 https://pubs.aip.org/aip/apl/article-pdf/73/26/3851/18538818/3851_1_online.pdf |
رقم الانضمام: | edsbas.C99542AF |
قاعدة البيانات: | BASE |
DOI: | 10.1063/1.122914 |
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