Conference
Residual flatness error correction in three-dimensional imaging confocal microscopes
| العنوان: | Residual flatness error correction in three-dimensional imaging confocal microscopes |
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| المؤلفون: | Bermúdez, Carlos, Felgner, André, Martínez Marín, Pol, Matilla Sánchez, Aitor, Cadevall Artigues, Cristina, Artigas Pursals, Roger |
| المساهمون: | Universitat Politècnica de Catalunya. Doctorat en Enginyeria Òptica, Universitat Politècnica de Catalunya. Centre de Desenvolupament de Sensors, Instrumentació i Sistemes, Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica |
| بيانات النشر: | International Society for Photo-Optical Instrumentation Engineers (SPIE) |
| سنة النشر: | 2018 |
| المجموعة: | Universitat Politècnica de Catalunya, BarcelonaTech: UPCommons - Global access to UPC knowledge |
| مصطلحات موضوعية: | Àrees temàtiques de la UPC::Ciències de la visió, Microscopy, Metrology, Calibration, Imaging systems, Confocal microscopy, Surface measurements, Microscòpia, Metrologia, Calibratge |
| الوصف: | Imaging Confocal Microscopes (ICM) are highly used for the assessment of three-dimensional measurement of technical surfaces. The benefit of an ICM in comparison to an interferometer is the use of high numerical aperture microscope objectives, which allows retrieving signal from high slope regions of a surface. When measuring a flat sample, such as a high-quality mirror, all ICM’s show a complex shape of low frequencies instead of a uniform flat result. Such shape, obtained from a ¿/10, Sa < 0.5 nm calibration mirror is used as a reference for being subtracted from all the measurements, according to ISO 25178-607. This is true and valid only for those surfaces that have small slopes. When measuring surfaces with varying local slopes or tilted with respect to the calibration, the flatness error calibration is no longer valid, leaving what is called the residual flatness error. In this paper we show that the residual flatness error on a reference sphere measured with a 10X can make the measurement of the radius to have up to 10% error. We analyzed the sources that generate this effect and proposed a method to correct it: we measured a tilted mirror with several angles and characterized the flatness error as a function of the distance to the optical axis, and the tilt angle. New measurements take into account such characterization by assessing the local slopes. We tested the method on calibrated reference spheres and proved to provide correct measurements. We also analyzed this behavior in Laser Scan as well on Microdisplay Scan confocal microscopes. ; Peer Reviewed ; Postprint (published version) |
| نوع الوثيقة: | conference object |
| وصف الملف: | application/pdf |
| اللغة: | English |
| ردمك: | 978-1-5106-1883-1 1-5106-1883-X |
| Relation: | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10678/106780M/Residual-flatness-error-correction-in-three-dimensional-imaging-confocal-microscopes/10.1117/12.2306903.short?SSO=1; Bermúdez, C. [et al.]. Residual flatness error correction in three-dimensional imaging confocal microscopes. A: SPIE Photonics Europe. "Optical Micro- and Nanometrology VII : 25-26 April 2018, Strasbourg, France". Washington: International Society for Photo-Optical Instrumentation Engineers (SPIE), 2018, p. 1106780M:1-1106780M:10. ISBN 9781510618831. DOI 10.1117/12.2306903.; http://hdl.handle.net/2117/352358 |
| DOI: | 10.1117/12.2306903 |
| الاتاحة: | http://hdl.handle.net/2117/352358 https://doi.org/10.1117/12.2306903 |
| Rights: | Restricted access - publisher's policy |
| رقم الانضمام: | edsbas.C7D5749B |
| قاعدة البيانات: | BASE |
| ردمك: | 9781510618831 151061883X |
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| DOI: | 10.1117/12.2306903 |