Academic Journal
Dust particle growth in rf silane plasmas using two-dimensional multi-pass laser light scattering
| العنوان: | Dust particle growth in rf silane plasmas using two-dimensional multi-pass laser light scattering |
|---|---|
| المؤلفون: | Chai, KB Chai, Kil Byoung, Seon, CR Seon, C. R., Park, S Park, S., Choe, W Choe, Wonho |
| بيانات النشر: | IOP PUBLISHING LTD |
| سنة النشر: | 2009 |
| المجموعة: | Korea Advanced Institute of Science and Technology: KOASAS - KAIST Open Access Self-Archiving System |
| الوصف: | We measured a spatio-temporal distribution of particle size and a spatial growth rate in a capacitively coupled silane plasma using in situ multi-pass laser light scattering. The two-dimensional measurement was accomplished using a low power He-Ne laser and a set of spherical mirrors across the plasma that enables us to span multiple beam paths over the plasma region in the vertical direction from the electrode sheath to the bulk plasma. In temporal, the measurement result shows two particle growth periods in which the fast particle growth (nucleation) is followed by the slow particle growth (coagulation). In spatial, the fastest particle growth occurred at the highest vertical position that corresponds to the furthest position from the sheath. The particle coagulation modeling indicates that it is consistent with the largest proto particle creation rate in the plasma bulk. ; This work was partly supported by the Korea Research Foundation grant (KRF-2008–314- C00085) and partly supported by the Korea Science and Engineering Foundation grant (no. R11-2008–072-02001–0) funded by the Korean Government. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1088/1367-2630/11/10/103006 |
| الاتاحة: | http://hdl.handle.net/10203/21993 https://doi.org/10.1088/1367-2630/11/10/103006 |
| رقم الانضمام: | edsbas.C330042E |
| قاعدة البيانات: | BASE |
| DOI: | 10.1088/1367-2630/11/10/103006 |
|---|