Academic Journal
Characterization of the VO 2 thin films grown on glass substrates by MOD
| العنوان: | Characterization of the VO 2 thin films grown on glass substrates by MOD |
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| المؤلفون: | Wada, Hideo, Fukawa, Taito, Toyota, Kazuaki, Koyama, Masatoshi, Hiroshiba, Nobuya, Koike, Kazuto |
| المصدر: | Electronics and Communications in Japan ; volume 106, issue 3 ; ISSN 1942-9533 1942-9541 |
| بيانات النشر: | Wiley |
| سنة النشر: | 2023 |
| المجموعة: | Wiley Online Library (Open Access Articles via Crossref) |
| الوصف: | This paper describes the deposition of Nb doped vanadium dioxide (VO 2 ) films on a glass substrate by metal organic decomposition (MOD) and their thermochromic properties. The difference in thermochromic properties of VO 2 thin films on a glass substrate was investigated with and without a buffer layer of Hf0.5Zr0.5O2 (HZO). The phase transition temperature of VO 2 thin film successfully reduced from 83°C to 43°C on a glass substrate with a buffer layer of HZO. Without a buffer layer of HZO, the thermochromic properties of VO 2 thin films deteriorated comparing with a buffer layer of HZO. HZO buffer layer effectively suppresses the miniaturization of VO 2 crystallite size of thin film due to Nb doping. Moreover, it would block out the diffusion of Al, Na, and Ca impurity ions from a glass substrate and the partial oxidation of VO 2 thin films judging from XPS O1s spectra and XPS depth profile analysis. We conclude that the insertion of the HZO buffer layer is a useful technique for controlling the transition temperature of VO 2 for the smart window applications by MOD. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1002/ecj.12403 |
| الاتاحة: | http://dx.doi.org/10.1002/ecj.12403 https://onlinelibrary.wiley.com/doi/pdf/10.1002/ecj.12403 |
| Rights: | http://onlinelibrary.wiley.com/termsAndConditions#vor |
| رقم الانضمام: | edsbas.BC20026E |
| قاعدة البيانات: | BASE |
| DOI: | 10.1002/ecj.12403 |
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