Academic Journal

The kinetics of the early stages of electromigration and concurrent temperature induced processes in thin film metallisations studied by means of an in-situ high resolution resistometric technique

التفاصيل البيبلوغرافية
العنوان: The kinetics of the early stages of electromigration and concurrent temperature induced processes in thin film metallisations studied by means of an in-situ high resolution resistometric technique
المؤلفون: Van Olmen, J., Manca, J.V., De Ceuninck, W., De Schepper, L., D’Haeger, V., Witvrouw, A., Maex, K., Vandevelde, B., Beyne, E., Tielemans, L.
المصدر: Microelectronics Reliability ; volume 39, issue 11, page 1657-1665 ; ISSN 0026-2714
بيانات النشر: Elsevier BV
سنة النشر: 1999
المجموعة: ScienceDirect (Elsevier - Open Access Articles via Crossref)
نوع الوثيقة: article in journal/newspaper
اللغة: English
DOI: 10.1016/s0026-2714(99)00168-7
الاتاحة: http://dx.doi.org/10.1016/s0026-2714(99)00168-7
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Rights: https://www.elsevier.com/tdm/userlicense/1.0/
رقم الانضمام: edsbas.B7749CCE
قاعدة البيانات: BASE
الوصف
DOI:10.1016/s0026-2714(99)00168-7