Academic Journal
Step height standards based on self-assembly for 3D metrology of biological samples
| العنوان: | Step height standards based on self-assembly for 3D metrology of biological samples |
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| المؤلفون: | Järvinen, Hannu, Kassamakov, I., Viitala, T., Bermúdez Porras, Carlos, Artigas Pursals, Roger, Martínez Marín, Pol |
| المساهمون: | Universitat Politècnica de Catalunya. Centre de Desenvolupament de Sensors, Instrumentació i Sistemes, Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica |
| سنة النشر: | 2020 |
| المجموعة: | Universitat Politècnica de Catalunya, BarcelonaTech: UPCommons - Global access to UPC knowledge |
| مصطلحات موضوعية: | Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura, Àrees temàtiques de la UPC::Ciències de la visió::Òptica física, Optical measurements, Metrology, Calibration, Nanometrology, Transfer standard, CSI, SWLI, AFM, Traceability, Òptica -- Mesuraments, Metrologia, Calibratge |
| الوصف: | Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability at any scale and utilize the full potential of these instruments, but transfer standards with similar characteristics upon reflection to those of the measured samples are preferred. This is currently not the case for samples featuring dimensions of less than 10 nm and for biosamples with different optical charasteristics to silicon, silica or metals. To address the need for 3D images of biosamples with traceable dimensions, we introduce a transfer standard with dimensions guaranteed by natural self-assembly and a material that is optically similar to that in typical biosamples. We test the functionality of these transfer standards by first calibrating them using an atomic force microscope (AFM) and then using them to calibrate a CSI. We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system. The result is that the calibration uncertainty is only marginally increased due to the sample ; Peer Reviewed ; Postprint (published version) |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 0957-0233 |
| Relation: | https://iopscience.iop.org/article/10.1088/1361-6501/ab8c6a; Järvinen, H. [et al.]. Step height standards based on self-assembly for 3D metrology of biological samples. "Measurement science and technology", 1 Setembre 2020, vol. 31, núm. 9, p. 94008-1-94008-6.; http://hdl.handle.net/2117/332256 |
| DOI: | 10.1088/1361-6501/ab8c6a |
| الاتاحة: | http://hdl.handle.net/2117/332256 https://doi.org/10.1088/1361-6501/ab8c6a |
| Rights: | Attribution 4.0 International ; https://creativecommons.org/licenses/by/4.0/ ; Open Access |
| رقم الانضمام: | edsbas.AEEFC60B |
| قاعدة البيانات: | BASE |
| تدمد: | 09570233 |
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| DOI: | 10.1088/1361-6501/ab8c6a |