Academic Journal
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film
| العنوان: | Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film |
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| المؤلفون: | Stefano Kuschlan, Riccardo Chiarcos, Michele Laus, Francesc Pérez-Murano, Jordi Llobet, Marta Fernandez-Regulez, Caroline Bonafos, Michele Perego, Gabriele Seguini, Marco De Michielis, Graziella Tallarida |
| المساهمون: | Kuschlan, Stefano, Chiarcos, Riccardo, Laus, Michele, Pérez-Murano, Francesc, Llobet, Jordi, Fernandez-Regulez, Marta, Bonafos, Caroline, Perego, Michele, Seguini, Gabriele, De Michielis, Marco, Tallarida, Graziella |
| سنة النشر: | 2023 |
| المجموعة: | Università degli Studi del Piemonte Orientale: CINECA IRIS |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | ELETTRONICO |
| اللغة: | English |
| Relation: | info:eu-repo/semantics/altIdentifier/wos/WOS:001008589200001; volume:15; issue:50; firstpage:57928; lastpage:57940; numberofpages:13; journal:ACS APPLIED MATERIALS & INTERFACES; https://hdl.handle.net/11579/171282; info:eu-repo/semantics/altIdentifier/scopus/2-s2.0-85163717666 |
| DOI: | 10.1021/acsami.3c03782 |
| الاتاحة: | https://hdl.handle.net/11579/171282 https://doi.org/10.1021/acsami.3c03782 |
| رقم الانضمام: | edsbas.A995F7B1 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1021/acsami.3c03782 |
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