Conference
Overcoat materials for acrylate resists to enhance their resolution
| العنوان: | Overcoat materials for acrylate resists to enhance their resolution |
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| المؤلفون: | Nozaki, Koji, Igarashi, Miwa, Yano, Ei, Yamamoto, Hajime, Takechi, Satoshi, Hanyu, Isamu |
| المساهمون: | Fedynyshyn, Theodore H. |
| المصدر: | Advances in Resist Technology and Processing XX ; SPIE Proceedings ; ISSN 0277-786X |
| بيانات النشر: | SPIE |
| سنة النشر: | 2003 |
| نوع الوثيقة: | conference object |
| اللغة: | unknown |
| DOI: | 10.1117/12.487727 |
| الاتاحة: | http://dx.doi.org/10.1117/12.487727 http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.487727 |
| رقم الانضمام: | edsbas.A4EAB0B4 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1117/12.487727 |
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