Academic Journal
Control of optical nanometer gap shapes made via standard lithography using atomic layer deposition
| العنوان: | Control of optical nanometer gap shapes made via standard lithography using atomic layer deposition |
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| المؤلفون: | Rhie, Jiyeah, Lee, Dukhyung, Bahk, Young-Mi, Jeong, Jeeyoon, Choi, Geunchang, Lee, Youjin, Kim, Sunghwan, Hong, Seunghun, Kim, Dai-Sik |
| المصدر: | Journal of Micro/Nanolithography, MEMS, and MOEMS ; volume 17, issue 02, page 1 ; ISSN 1932-5150 |
| بيانات النشر: | SPIE-Intl Soc Optical Eng |
| سنة النشر: | 2018 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| DOI: | 10.1117/1.jmm.17.2.023504 |
| الاتاحة: | http://dx.doi.org/10.1117/1.jmm.17.2.023504 https://www.spiedigitallibrary.org/journalArticle/Download?urlId=10.1117%2F1.JMM.17.2.023504 |
| رقم الانضمام: | edsbas.9F9A6069 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1117/1.jmm.17.2.023504 |
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