Academic Journal
Defect Localization and Nanofabrication for Conductive Structures with Voltage Contrast in Helium Ion Microscopy
| العنوان: | Defect Localization and Nanofabrication for Conductive Structures with Voltage Contrast in Helium Ion Microscopy |
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| المؤلفون: | Xia, Deying, McVey, Shawn, Huynh, Chuong, Kuehn, Wilhelm |
| المصدر: | ACS Applied Materials & Interfaces ; volume 11, issue 5, page 5509-5516 ; ISSN 1944-8244 1944-8252 |
| بيانات النشر: | American Chemical Society (ACS) |
| سنة النشر: | 2019 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1021/acsami.8b18083 |
| الاتاحة: | http://dx.doi.org/10.1021/acsami.8b18083 https://pubs.acs.org/doi/pdf/10.1021/acsami.8b18083 |
| Rights: | https://doi.org/10.15223/policy-029 ; https://doi.org/10.15223/policy-037 ; https://doi.org/10.15223/policy-045 |
| رقم الانضمام: | edsbas.8B2FB028 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1021/acsami.8b18083 |
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