التفاصيل البيبلوغرافية
| العنوان: |
Supplementary document for Fabrication and transfer printing based integration of free-standing GaN membrane micro-lenses onto semiconductor chips - 6003216.pdf |
| المؤلفون: |
Nils Wessling, Saptarsi Ghosh, Benoit Guilhabert, Menno Kappers, Alexander Hinz, Miles Toon, Rachel Oliver, Martin D. Dawson, Michael Strain |
| سنة النشر: |
2022 |
| المجموعة: |
The Optical Society: Figshare |
| مصطلحات موضوعية: |
Uncategorized, Materials for Integrated Optics, Optomechanics and Quantum Optics |
| الوصف: |
This supplemental document provides additional information on the process flow, the connection between wafer and membrane bow and spectral information regarding the optical analysis. |
| نوع الوثيقة: |
article in journal/newspaper |
| اللغة: |
unknown |
| Relation: |
https://figshare.com/articles/journal_contribution/Supplementary_document_for_Fabrication_and_transfer_printing_based_integration_of_free-standing_GaN_membrane_micro-lenses_onto_semiconductor_chips_-_6003216_pdf/21545451 |
| DOI: |
10.6084/m9.figshare.21545451.v2 |
| الاتاحة: |
https://doi.org/10.6084/m9.figshare.21545451.v2
https://figshare.com/articles/journal_contribution/Supplementary_document_for_Fabrication_and_transfer_printing_based_integration_of_free-standing_GaN_membrane_micro-lenses_onto_semiconductor_chips_-_6003216_pdf/21545451 |
| Rights: |
CC BY 4.0 |
| رقم الانضمام: |
edsbas.8961B20A |
| قاعدة البيانات: |
BASE |