Academic Journal
The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films
| العنوان: | The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin films |
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| المؤلفون: | Mary Joy, Rani, Pobedinskas, Paulius, Baule, N, Bai, S, Jannis, D, Gaquelin, N, Pinault-Thaury, Marie-Amandine, Jomard, F, Jothiramalingam Sankaran, Kamatchi, Rouzbahani, Rozita, Lloret Vieira, Fernando Manuel, Desta, Derese, D´haen, J, Verbeeck, J, Becker, MF, Haenen, Ken |
| المساهمون: | Física Aplicada |
| المصدر: | Acta Materialia, Vol. 264 |
| سنة النشر: | 2024 |
| المجموعة: | RODIN - Repositorio de Objetos de Docencia e Investigación de la Universidad de Cádiz |
| مصطلحات موضوعية: | Linear antenna, CVD reactor, Nanocrystalline diamond, Young’s modulus, Residual stress |
| الوصف: | This study reports the impact of film microstructure and composition on the Young's modulus and residual stress in nanocrystalline diamond (NCD) thin films (≈250nm thick) grown on silicon substrates using a linear antenna microwave plasma-enhanced chemical vapor deposition (CVD) system. Combining laser acoustic wave spectroscopy to determine the elastic properties with simple wafer curvature measurements, a straightforward method to determine the intrinsic stress in NCD films is presented. Two deposition parameters are varied: (1) the substrate temperature from 400 °C to 900 °C, and (2) the [P]/[C] ratio from 0 ppm to 8090 ppm in the H2/CH4/CO2/PH3 diamond CVD plasma. The introduction of PH3 induces a transition in the morphology of the diamond film, shifting from NCD with larger grains to ultra-NCD with a smaller grain size, concurrently resulting in a decrease in Young's modulus. Results show that the highest Young's modulus of (1130±50) GPa for the undoped NCD deposited at 800 °C is comparable to single crystal diamond, indicating that NCD with excellent mechanical properties is achievable with our process for thin diamond films. Based on the film stress results, we propose the origins of tensile intrinsic stress in the diamond films. In NCD, the tensile intrinsic stress is attributed to larger grain size, while in ultra-NCD films the tensile intrinsic stress is due to grain boundaries and impurities. |
| نوع الوثيقة: | article in journal/newspaper |
| وصف الملف: | application/pdf |
| اللغة: | English |
| تدمد: | 1359-6454 |
| Relation: | http://hdl.handle.net/10498/30528 |
| DOI: | 10.1016/J.ACTAMAT.2023.119548 |
| الاتاحة: | http://hdl.handle.net/10498/30528 https://doi.org/10.1016/J.ACTAMAT.2023.119548 |
| Rights: | closed access |
| رقم الانضمام: | edsbas.883A4855 |
| قاعدة البيانات: | BASE |
| تدمد: | 13596454 |
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| DOI: | 10.1016/J.ACTAMAT.2023.119548 |