Academic Journal
Improving the water-resistance of MgO-based metal–insulator–metal capacitors by inserting a BeO thin film grown via atomic layer deposition
| العنوان: | Improving the water-resistance of MgO-based metal–insulator–metal capacitors by inserting a BeO thin film grown via atomic layer deposition |
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| المؤلفون: | Wang, Bo Wen, Kim, Seungsoo, Song, Haewon, Seo, Haengha, Li, Xiangyuan, Choi, Jin Myung, Choi, Jinwoo, Shin, Jonghoon, Hwang, Cheol Seong |
| المساهمون: | National Research Foundation of Korea |
| المصدر: | Journal of Materials Chemistry C ; volume 10, issue 17, page 6611-6620 ; ISSN 2050-7526 2050-7534 |
| بيانات النشر: | Royal Society of Chemistry (RSC) |
| سنة النشر: | 2022 |
| الوصف: | To improve the water-resistance of MgO-based metal–insulator–metal capacitors, BeO/MgO/BeO/MgO/BeO stacked layers were deposited by atomic layer deposition using bis(cyclopentadienyl)magnesium and diethyl beryllium and O 3 as an oxygen source. |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | English |
| DOI: | 10.1039/d2tc00595f |
| الاتاحة: | http://dx.doi.org/10.1039/d2tc00595f http://pubs.rsc.org/en/content/articlepdf/2022/TC/D2TC00595F |
| Rights: | http://rsc.li/journals-terms-of-use |
| رقم الانضمام: | edsbas.8813B125 |
| قاعدة البيانات: | BASE |
| DOI: | 10.1039/d2tc00595f |
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